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Title: A study of measurement technology for ultra-precision freeform surfaces
Authors: Li, HF
Cheung, CF 
Kong, LB
Lee, WB 
To, S 
Keywords: Advanced optics manufacture
Freeform surface
Measurement technology
Surface characterization
Ultra-precision machining
Issue Date: 2007
Publisher: Scientific.Net
Source: Key engineering materials, 2007, v. 339, p. 417-421 How to cite?
Journal: Key engineering materials 
Abstract: Ultra-precision freeform surfaces have become widely used in advanced optics manufacture. Although these surfaces can be fabricated by ultra-precision freeform machining technology with sub-micrometer form accuracy and surface finish in nanometer range, our current understanding on the evaluation of surface quality of these surfaces is still far from perfect. In this paper, a study of measurement technology for ultra-precision freeform surfaces is presented.
ISSN: 1013-9826
EISSN: 1662-9795
DOI: 10.4028/0-87849-430-8.417
Appears in Collections:Conference Paper

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