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Title: A study of characterisation of surface generation in ultra-precision polishing using power spectrum analysis
Authors: Ho, LT
Cheung, CF 
Keywords: Precision surface measurement
Spectrum analysis
Surface characterisation
Surface generation
Ultra-precision polishing
Issue Date: 2012
Source: International journal of nanomanufacturing, 2012, v. 8, no. 1-2, p. 140-160 How to cite?
Journal: International Journal of Nanomanufacturing 
Abstract: This paper aims to characterise the surface generation in ultra-precision polishing using power spectrum analysis. The surface characteristics of mechanical polished surfaces and fluid jet polished surfaces are extracted, decomposed and analysed by power spectrum analysis of their surface roughness profiles. It is found that the surface roughness in both mechanical polishing and fluid jet polishing is mainly composed of low frequency components. With the aid of power spectrum analysis, it is also observed that the capability of machine signature removal and surface structure modification of fluid jet polishing are less effective than in mechanical polishing.
ISSN: 1746-9392
DOI: 10.1504/IJNM.2012.044661
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