Please use this identifier to cite or link to this item: http://hdl.handle.net/10397/21576
Title: Studies on laser ablation of low temperature co-fired ceramics (LTCC)
Authors: Zhu, J
Yung, WKC 
Keywords: Laser ablation
LTCC
Microfluidic chip
Issue Date: 2009
Publisher: Springer
Source: International journal of advanced manufacturing technology, 2009, v. 42, no. 7-8, p. 696-702 How to cite?
Journal: International journal of advanced manufacturing technology 
Abstract: LTCC material is introduced as an excellent alternative to silicon, glass or plastic materials for the fabrication of miniaturised analytical devices, though it is most widely used in the automotive industry and microwave industry. Laser ablation of LTCC material was studied in this report. This kind of green tape material is mechanised by excimer laser (KrF, 248 nm) and UV laser (Nd:YAG, 355 nm) and, for the first time, by infrared laser (1,090 nm). The optical photos and the SEM photos of the LTCC ablated by different kinds of laser sources are given in this paper. For the first time, we discuss the laser ablation of LTCC by optical fibre sources. When using the excimer laser, the tapered structure can be easily seen from the SEM photo. However, a kind of clear and perfect ablation of LTCC can be seen for the first time by the 1,090-nm infrared laser ablation.
URI: http://hdl.handle.net/10397/21576
ISSN: 0268-3768
EISSN: 1433-3015
DOI: 10.1007/s00170-008-1647-6
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