Please use this identifier to cite or link to this item: http://hdl.handle.net/10397/21094
Title: An adaptive multi-parameter based dispatching strategy for single-loop interbay material handling systems
Authors: Wu, LH
Mok, PY 
Zhang, J
Keywords: Adaptive
Interbay material handling system
Multi-parameter
Semiconductor wafer fabrication
Vehicle dispatching
Issue Date: 2011
Publisher: Elsevier
Source: Computers in industry, 2011, v. 62, no. 2, p. 175-186 How to cite?
Journal: Computers in industry 
Abstract: The automation of interbay systems in 300 mm semiconductor wafer fabrication systems (SWFSs) is complex due to the dynamic, stochastic and mass transportation demands, transportation deadlocks, and vehicle blockages. An adaptive multi-parameter based (AMP) dispatching policy is proposed to obtain better performance of the interbay material handling systems and SWFSs. The system parameters, including vehicle's distance, lot's due date, lot's waiting time, and lot's origin-destination buffer status parameters are simultaneously considered, and the multi-parameter's weight coefficients are adjusted adaptively by Takagi-Sugeno fuzzy logic method. With experimental data from an interbay system of 300 mm SWFSs and running simulation experiments, it is demonstrated that the proposed approach has better performance in terms of cycle time, throughput, due-date satisfaction rate, and vehicle utilization compared to conventional single- and multi-attribute dispatching methodologies.
URI: http://hdl.handle.net/10397/21094
ISSN: 0166-3615
DOI: 10.1016/j.compind.2010.10.010
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