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Title: Characterization of microstructure freeform surfaces using a pattern matching analysis
Authors: Cheung, CF 
Kong, LB
Lee, WB 
To, S 
Keywords: Fast tool servo machinin
Form error
Microlens array
Microstructure freeform Surfaces
Pattern matching
Surface characterization
Issue Date: 2008
Source: Proceedings of 23rd ASPE Annual Meeting and 12th ICPE, Portland, Oregon, USA, 19-24 Oct 2008, p. 587-590 How to cite?
Abstract: Microstructure freeform surface is a type of freeform surfaces which is widely used in optical-mechanical-electronic components with increasing high precision requirement. This paper presents the characterization of structured freeform surfaces based on a pattern matching analysis method. The method employed rough matching by micro-structure features and then precise matching based on least squared criteria to optimize matching results. The capability of the proposed method is realized through a trial implementation of a prototype surface characterization system With the successful development of the pattern matching analysis method, the accuracy and the efficiency of the characterization of the microstructure freeform surfaces such as micro-lens array can be significantly increased.
Description: 23rd Annual Meeting of the American Society for Precision Engineering, ASPE 2008 and the 12th ICPE, Portland, OR, 19-24 October 2008
ISBN: 9781887706483
Appears in Collections:Conference Paper

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