Please use this identifier to cite or link to this item: http://hdl.handle.net/10397/20738
Title: A microfluidic system with embedded acoustic wave sensor for in situ detection of dynamic fluidic properties
Authors: Zhang, K
Zhao, L
Guo, S
Shi, B
Chen, Y
Chan, HLW 
Wang, Y 
Keywords: Acoustic wave sensor
Dynamic fluids
Frequency shift
In situ detection
Microfluidic system
Issue Date: 2010
Publisher: Elsevier
Source: Microelectronic engineering, 2010, v. 87, no. 4, p. 658-662 How to cite?
Journal: Microelectronic engineering 
Abstract: A microfluidic system with acoustic wave sensor employing quartz crystal microbalance embedded in the microfluidic channel was developed by soft-lithography technique and characterized by measuring resonance frequency of the sensor under different service conditions. Detections of dynamic fluids in various concentrations and flow rates showed that shift of resonant frequency was observed when there was variation in mass or viscosity of the fluid passing through the microchannels. Through a calibration experiment by monitoring continuous flowing fluids with suspended microparticles, the sensitivity of the system was found to be ∼15 Hz cm2/ng. All these results suggest that the microfluidic system can be employed in in situ monitoring of chemical and biochemical processes involving mass and/or viscosity changes within the microfluidic system.
URI: http://hdl.handle.net/10397/20738
ISSN: 0167-9317
EISSN: 1873-5568
DOI: 10.1016/j.mee.2009.09.008
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