Please use this identifier to cite or link to this item: http://hdl.handle.net/10397/20673
Title: An experimental five-sensor system for measuring straightness and yawing motion errors of a linear slide
Authors: Fung, EHK
Keywords: Error motion
Error separation
Five-sensor system
Linear slide
On-machine measurement
Straightness measurement
Yawing error
Issue Date: 2008
Publisher: Institute of Physics Publishing
Source: Measurement science and technology, 2008, v. 19, no. 7, 75102 How to cite?
Journal: Measurement science and technology 
Abstract: In this study, a measurement system consisting of five distance sensors is designed and built to on-machine determine the straightness and yawing motion errors of a linear slide. The procedure to implement the proposed error separation method [1] is first discussed. The method can separate the yawing motion error from the straightness motion without knowing the slide profile beforehand. The experimental set-up and the testing procedure are then described. To verify the capability of this measurement system, a series of computer simulation and measurement experiments are undertaken. Comparison of the results with those obtained by a laser interferometer is also made to evaluate the system performance. Two error sources, i.e. sensor gain error and sensor placement error, which cause measurement uncertainty, are also studied by computer simulations. Testing results confirm that the measurement system can be used to determine the straightness motion with accuracy down to 1 νm. Good reproducibility of the profile results is also obtained.
URI: http://hdl.handle.net/10397/20673
ISSN: 0957-0233
EISSN: 1361-6501
DOI: 10.1088/0957-0233/19/7/075102
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