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Title: Feature development on prepatterned elastomer surfaces upon ion implantation
Authors: Sun, Y
Wang, HY
Xiong, T
Chu, PK
Leung, CW 
Keywords: Ion implantation
Issue Date: 2013
Publisher: Elsevier
Journal: Microelectronic engineering 
Abstract: Oxygen plasma ion implantation on the common elastomer polydimethylsiloxane (PDMS) can induce wrinkled and disordered surface morphologies. Here we present a convenient approach of generating (sub)micron-sized features, in order to control the development of such ripple-like features during plasma treatment process. The correlations between the spontaneous patterns with different surface treatment conditions, such as plasma bias voltage and processing time, as well as the effect of surface prepatterns, were studied. The presence of prepatterns suppressed the formation of ripples on the implanted PDMS surfaces, which is advantageous for eliminating the rough surface topologies induced in plasma-treated samples.
ISSN: 0167-9317
EISSN: 1873-5568
DOI: 10.1016/j.mee.2013.02.054
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