Please use this identifier to cite or link to this item: http://hdl.handle.net/10397/20260
Title: Low cost fabrication of microelectrodes on plastic substrate
Authors: Xu, Y
Huang, LB
Yung, KL 
Xie, YC
Lee, TMH 
Issue Date: 2011
Publisher: Springer
Source: Microsystem technologies, 2011, v. 17, no. 3, p. 361-366 How to cite?
Journal: Microsystem Technologies 
Abstract: A low cost method of fabricating thick film microelectrodes on plastic substrate for producing integrated plastic biochips is introduced in this paper. Microelectrodes for pumping liquid in a PCR plastic biochip were successfully fabricated using a metal stamp and commercially available Au films. Testing results show that the microelectrode produced with the metal stamp is more reliable and can last longer than those fabricated with sputtering techniques. The fabrication method demonstrated in this paper provides a new low cost technology that is suitable for mass production of thick-film microelectrodes of high electrical conductivity on plastic biochips.
URI: http://hdl.handle.net/10397/20260
DOI: 10.1007/s00542-011-1278-y
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