Please use this identifier to cite or link to this item: http://hdl.handle.net/10397/20188
Title: Effects of the insertion of a thick sp2 buffer layer on the adhesion of cBN-rich film
Authors: Wong, SF
Ong, CW 
Pang, GKH
Baba-Kishi, KZ
Lau, WM
Issue Date: 2004
Publisher: A V S Amer Inst Physics
Source: Journal of vacuum science and technology a : vacuum, surfaces and films, 2004, v. 22, no. 3, p. 676-682 How to cite?
Journal: Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films 
Abstract: A method was developed for improving the adhesion and increasing the maximum sustainable thickness of cBN-rich films. This method involved the combination of two methods - one which involved the insertion of a thick sp 2 buffer layer, and second which involved the use of appropriate ion beam energy for assisting the growth of the top cBN-rich layer. The energetic ion bombarding on the growing surface was found to result in the creation and annihilation of defects concurrently, which ultimately resulted in the generation or relaxation of internal stresses. The results indicate that the buffer layer formed under ion bombardment at ion beam energy of 200-360 eV, contains curled and randomly oriented graphite basal planes.
URI: http://hdl.handle.net/10397/20188
ISSN: 0734-2101
DOI: 10.1116/1.1723192
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