Please use this identifier to cite or link to this item: http://hdl.handle.net/10397/19901
Title: Capacitive micromachined ultrasonic transducer (CMUT) array with single-layer graphene membrane
Authors: Chong, PF
Shi, X
Cheng, CH 
Issue Date: 2014
Publisher: Institution of Engineering and Technology
Source: Micro and nano letters, 2014, v. 9, no. 12, p. 884-886 How to cite?
Journal: Micro and Nano Letters 
Abstract: A capacitive micromachined ultrasonic transducer (CMUT) with a graphene membrane is reported. The CMUT membranes were commonly made from very thin silicon nitride or metal material. To date, no graphene CMUT has been successfully used. In this reported work, a photomask were used for the cavity pattern to make a 1£gm layer EPON SU-8 photoresist on the silicon substrate. Then a single-layer graphene were tranferred directly to be attached to the EPON SU-8 cavity layer to form the CMUT with a graphene membrane. The resonance frequency was measured to be 95 MHz in air.
URI: http://hdl.handle.net/10397/19901
EISSN: 1750-0443
DOI: 10.1049/mnl.2014.0421
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