Please use this identifier to cite or link to this item: http://hdl.handle.net/10397/19840
Title: Rapid prototyping of polymer-based MEMS devices using UV YAG laser
Authors: Yung, KC 
Mei, SM
Yue, TM 
Issue Date: 2004
Source: Journal of micromechanics and microengineering, 2004, v. 14, no. 12, p. 1682-1686 How to cite?
Journal: Journal of Micromechanics and Microengineering 
Abstract: This paper deals with the laser micro processing technology in the fabrication of micro-electro-mechanical system (MEMS) device. A polymer-based capacitive micro accelerometer is designed and modeled in this paper, and is fabricated with laser micromachining and micro patterning technologies. The fabricated micro accelerometer is finally experimentally verified by measuring the shock of a dropping hammer. It is demonstrated that pulsed UV laser micro processing technology provides a quite suitable fabrication method for polymer-based MEMS rapid prototyping and small volume production.
URI: http://hdl.handle.net/10397/19840
ISSN: 0960-1317
DOI: 10.1088/0960-1317/14/12/012
Appears in Collections:Journal/Magazine Article

Access
View full-text via PolyU eLinks SFX Query
Show full item record

SCOPUSTM   
Citations

4
Last Week
0
Last month
0
Citations as of Aug 17, 2017

WEB OF SCIENCETM
Citations

4
Last Week
0
Last month
0
Citations as of Aug 23, 2017

Page view(s)

38
Last Week
5
Last month
Checked on Aug 21, 2017

Google ScholarTM

Check

Altmetric



Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.