Please use this identifier to cite or link to this item: http://hdl.handle.net/10397/19042
Title: An error separation technique for measuring straightness motion error of a linear slide
Authors: Fung, EHK
Yang, SM
Keywords: Fourier analysis
Multisensor
On-machine measurement
Precision linear slide
Straightness motion error
Issue Date: 2000
Publisher: Iop Publishing Ltd
Source: Measurement science and technology, 2000, v. 11, no. 10, p. 1515-1521 How to cite?
Journal: Measurement Science and Technology 
Abstract: A novel measurement system for on-machine determination of the straightness motion error and profile of a precision linear slide for active error compensation (AEC) purposes has successfully been developed. The characteristics of the proposed measurement method are: (i) the profile is determined under on-machine conditions requiring no pre-calibration; and (ii) a novel approach involving representation of the test section of the profile by one cycle of a periodic function is facilitated by specially arranging three sensors to form a stationary stage. In this paper, the principles and operation of the measurement method are presented. The approach of defining a periodic function to deal with the problem of non-periodicity of a profile is then described. A preliminary analysis of the sensor measurement errors is also given. Finally, the measurement system consisting of three non-contact capacitive sensors is built and evaluated experimentally on a laboratory lathe and good reproducibility of profile results is obtained.A novel measurement system for on-machine determination of the straightness motion error and profile of a precision linear slide for active error compensation (AEC) purposes has successfully been developed. The characteristics of the proposed measurement method are: (i) the profile is determined under on-machine conditions requiring no pre-calibration; and (ii) a novel approach involving representation of the test section of the profile by one cycle of a periodic function is facilitated by specially arranging three sensors to form a stationary stage. In this paper, the principles and operation of the measurement method are presented. The approach of defining a periodic function to deal with the problem of non-periodicity of a profile is then described. A preliminary analysis of the sensor measurement errors is also given. Finally, the measurement system consisting of three non-contact capacitive sensors is built and evaluated experimentally on a laboratory lathe and good reproducibility of profile results is obtained.
URI: http://hdl.handle.net/10397/19042
ISSN: 0957-0233
DOI: 10.1088/0957-0233/11/10/313
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