Please use this identifier to cite or link to this item: http://hdl.handle.net/10397/18719
Title: Pyroelectric sensor array for in-line monitoring of infrared laser
Authors: Chong, N
Chan, HLW 
Choy, CL 
Keywords: In-line monitoring
Infrared laser
Pyroelectric sensor array
Issue Date: 2002
Publisher: Elsevier
Source: Sensors and actuators. A, Physical, 2002, v. 96, no. 2-3, p. 231-238 How to cite?
Journal: Sensors and actuators. A, Physical 
Abstract: The fabrication and characterization of a freestanding pyroelectric sensor array based on zinc oxide for near-infrared imaging purposes are reported. The array consists of 4 × 4 pyroelectric sensing elements on a self-suspended silicon nitride/silicon oxide membrane. An access ho on the silicon substrate provides an access to incident laser for in-line and in situ beam profiling. The back-etch was done by standard KOH wet etch. The pyroelectric sensor material was zinc oxide thin-film deposited by magnetron sputtering. The pyroelectric thin-film exhibited (0 0 2) preferred orientation on gold bottom electrodes. The piezoelectric property of the oxide thin-film was also measured by laser interferometry. The current sensitivity, frequency dependence and detectivity of the freestanding array were measured with laser diodes. A brief discussion is dedicated to the microphony induced by piezoelectricity.
URI: http://hdl.handle.net/10397/18719
ISSN: 0924-4247
EISSN: 1873-3069
DOI: 10.1016/S0924-4247(01)00775-0
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