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Title: Spectroscopic ellipsometry studies of BaxSr(1-x)TiO3 multilayer structure
Authors: Zhang, YL
Mo, D
Adikary, SU
Mak, CL 
Chen, HLW 
Choy, CL 
Keywords: BaxSr(1-x)TiO3
Multilayer thin film
Optical constants
Spectroscopic ellipsometry
Issue Date: 2003
Publisher: 中國學術期刊 (光盤版) 電子雜誌社
Source: 紅外與毫米波學報 (Journal of infrared and millimeter waves), 2003, v. 22, no. 1, p. 13-17 How to cite?
Journal: 紅外與毫米波學報 (Journal of infrared and millimeter waves) 
Abstract: BaxSr(1-x)TiO3 single layer and graded multilayer structure films ( Ba0.7Sr0.3 TiO3, Ba0.8Sr0.2TiO3, Ba0.9Sr0.lTiO3, BaTiO3) deposited on Si (100) substrate were prepared by sol-gel technique. The variable angle spectroscopic ellipsometric spectra of the BaxSr(1-x)TiO3 multilayer structure film were obtained in the spectral range of 380-800 nm, and the thickness and refractive index of the BaxSr(1-x)TiO3 multilayer structure film were determined for the first time. The results show that the thickness of multilayer structure film from ellipsometric spectra is consistent with that from RBS, and the refractive index of BaTiO3 film in multilayer is much larger than that in single layer, but closer to that in single crystal.
ISSN: 1001-9014
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