Please use this identifier to cite or link to this item: http://hdl.handle.net/10397/18105
Title: Analysis of vibration power flow from a vibrating machinery to a floating elastic panel
Authors: Xie, S
Or, SW 
Chan, HLW 
Choy, PK
Liu, PCK
Keywords: Floating elastic panel
Power flow
Semiconductor wire-bonding equipment
Vibration isolation
Vibration transmission
X-Y motion stage
Issue Date: 2007
Publisher: Academic Press
Source: Mechanical systems and signal processing, 2007, v. 21, no. 1, p. 389-404 How to cite?
Journal: Mechanical systems and signal processing 
Abstract: A fully rigid-elastic-coupled dynamic model was developed for a vibration isolation system consisting of a rigid vibrating machinery, multiple resilient mounts and a floating elastic panel. This model was applied to investigate the vibration power transmission behavior of an X-Y motion stage-based system used in semiconductor wire-bonding equipment. The natural frequencies and modal characteristics of the system and its subsystems were numerically evaluated. The total power flow from the X-Y motion stage (the vibrating machinery) to the equipment table (the floating elastic panel) through multiple resilient mounts and the contribution of each force component at mounting junctions to the total power flow were analysed in the concerned frequency range for different types of excitations. The total power flow predicted by the developed model was also compared with that calculated using a conventional elastic support model. It was shown that the developed model provides a more accurate prediction of the total power flow in the frequency range of interest.
URI: http://hdl.handle.net/10397/18105
ISSN: 0888-3270
EISSN: 1096-1216
DOI: 10.1016/j.ymssp.2005.11.004
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