Please use this identifier to cite or link to this item: http://hdl.handle.net/10397/17665
Title: Dependence of capacitance on electrode configuration for ferroelectric films with interdigital electrodes
Authors: Wang, Y 
Chong, N
Cheng, YL
Chan, HLW 
Choy, CL
Keywords: Dielectric
Film
Interdigital electrodes
Size effect
Issue Date: 2003
Publisher: Elsevier
Source: Microelectronic engineering, 2003, v. 66, no. 1-4, p. 880-886 How to cite?
Journal: Microelectronic engineering 
Abstract: The dependence of the capacitance of ferroelectric film-based interdigital capacitors (IDC) on the electrode configuration has been investigated using the Gevorgiann model. The electrode spacing, width, overlapping length, thickness and electrode 'finger' number have different influences on the capacitance. The calculation results were fitted for a semi-quantitative description of the capacitance relationship with each of these parameters, which is expected to be helpful for interdigital device design, development, and evaluation.
Description: IUMRS-ICEM 2002, Xi an, 10-14 June 2002
URI: http://hdl.handle.net/10397/17665
ISSN: 0167-9317
EISSN: 1873-5568
DOI: 10.1016/S0167-9317(02)01015-8
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