Please use this identifier to cite or link to this item: http://hdl.handle.net/10397/17452
Title: Structural, dielectric and optical properties of Ba(Ti, Zr)O3 thin films prepared by chemical solution deposition
Authors: Tang, XG
Chan, HLW 
Ding, AL
Keywords: BTZ thin films
Dielectric properties
Ellipsometry
Optical properties
Issue Date: 2004
Publisher: Elsevier
Source: Thin solid films, 2004, v. 460, no. 1-2, p. 227-231 How to cite?
Journal: Thin solid films 
Abstract: Ba(Ti0.95Zr0.05)O3 (BTZ) thin films grown on Pt/Ti/SiO2/Si(100) substrates were prepared by chemical solution deposition. The structure and surface morphology of BTZ thin films has been studied by X-ray diffraction (XRD) and scanning electron microscope (SEM). At 100 kHz, the dielectric constant and dissipation factor of the BTZ film are 121 and 0.016, respectively. The ellipsometric spectrum of the BTZ thin film annealed at 730°C was measured in the range of wavelength from 355 to 1700 nm. Assuming a five-layer model (air/surface roughness layer/BTZ/interface layer/Pt) for the BTZ thin films on platinized silicon substrates, the optical constant spectra (refractive index n and the extinction coefficient k) of the BTZ thin films were obtained.
URI: http://hdl.handle.net/10397/17452
ISSN: 0040-6090
EISSN: 1879-2731
DOI: 10.1016/j.tsf.2004.01.071
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