Please use this identifier to cite or link to this item: http://hdl.handle.net/10397/16656
Title: TEM investigation of hydrogen-implanted and annealed single-crystal SrTiO3
Authors: Pang, GKH
Tai, CW
Wang, Y 
Liu, WL
Song, ZT
Feng, SL
Chan, HLW 
Choy, CL 
Keywords: H+ implantation
SrTiO3
Transmission electron microscopy (TEM)
Issue Date: 2006
Publisher: Elsevier
Source: Current applied physics, 2006, v. 6, no. 3, p. 583-586 How to cite?
Journal: Current applied physics 
Abstract: In this study, the structural properties of single-crystal SrTiO3 implanted with H+ have been investigated by transmission electron microcopy (TEM). The investigation was carried out on an as-implanted sample and samples after annealing at 500 °C and 700 °C for 2 h. It shows that the basic process of layer splitting involves the formation of microcracks and microcavities in the depth determined from the implanted energy similar to the process in the case of silicon. The as-implanted sample shows large out-of-plane strain also similar to the report in silicon. The microcavities are filled with amorphous material as the result of complicated interaction of the defects during the annealing.
URI: http://hdl.handle.net/10397/16656
ISSN: 1567-1739
DOI: 10.1016/j.cap.2005.11.066
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