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Title: Artificial hair cell sensors using liquid metal alloy as piezoresistors
Authors: Shi, X
Cheng, CH 
Keywords: Flexible
Force sensor
Hair cell
Liquid metal
Issue Date: 2013
Publisher: IEEE
Source: 2013 8th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (NEMS), 7-10 April 2013, Suzhou, p. 978-981 How to cite?
Abstract: In this paper, we present the design, fabrication process, and testing results of an artificial hair cell sensor made by liquid metal encapsulated in a polydimethylsiloxane (PDMS) substrate. Previously, a flexible force sensor was reported from our group, which can detect both normal and shear forces by using liquid metal alloy (Ga-In-Sn) as piezoresistive gauge material encapsulated in a PDMS substrate. Based on this method, we propose an artificial hair cell sensor which can detect two-axis tactile force with a standing artificial hair shaft. Since the liquid-metal piezoresistors deform with the elastomeric substrate, normal and shear force can be detected with resistance changes of the piezoresistors. Each force sensor comprises a pair of symmetric piezoresistors, which is screen-printed on a suspended PDMS membrane with opposite direction to be sensitive to shear forces. The testing results demonstrate the sensitivity of the force sensor in two-axis directions.
ISBN: 978-1-4673-6351-8 (E-ISBN)
DOI: 10.1109/NEMS.2013.6559886
Appears in Collections:Conference Paper

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