A robust fully-digital drive for linear permanent magnet synchronous motor

Abstract

High-speed and high-precision linear motions are found in many industrial applications, such as the wire-bonding and die-bonding of microelectronic components [1]. In order to achieve the strict requirements of next-generation semiconductor packaging machines, a high-performance linear drive system is developed. The linear drive system consists of a Linear Permanent Magnet Synchronous Motor (LPMSM), and a DSP-based fully digital PWM drive. To increase the current dynamics, overrated momentary high-voltage and high-current are injected to the actuator's coils, through the PWM drive. Finally, to improve the system robustness, a force compensation loop is derived to attain the system dynamic response when load variation is present. This paper describes the development of such a robust linear drive system. The paper includes (i) the construction and modelling of the Permanent Magnet Synchronous Linear Drive (PMSM); (ii) the design of the robust linear drive and the control system; (iii) the hardware implementation of the linear drive system; and (iv) the implementation results. The final results show that the system is capable of maintaining the same motion dynamic with load variation from 1kg to 2kg.