A nonlinear finite element model of a piezoelectric tube actuator with hysteresis and creep

Abstract

Piezoelectric tube actuators are commonly used for nanopositioning in atomic force microscopes (AFMs). However, piezoelectric tube actuators exhibit hysteresis and creep which significantly limit the accuracy of nanopositioning. A finite element model of a piezoelectric tube actuator with hysteresis and creep is important for control purposes, but so far one has not been developed. The purpose of this paper is to present a nonlinear finite element (FE) model with hysteresis and creep for design purposes. Prandtl-Ishlinskii (PI) hysteresis operators and creep operators are adopted into constitutive equations. The nonlinear FE model is formulated using energy approach and Hamilton's principle. The parameters of the PI hysteresis operators and the creep operators are identified by comparing the simulation results and experimental results of other researchers. The working operation of the piezoelectric tube actuator is simulated by the reduced order FE model, and the displacement error due to hysteresis, creep and coupling effect is investigated. An output feedback controller is implemented into the reduced order FE model to show that this model is controllable.