Please use this identifier to cite or link to this item: http://hdl.handle.net/10397/15913
Title: Anti-vibration characteristics of a lateral shear interferometer for on-machine surface measurement
Authors: Liu, X
Gao, Y
To, S 
Lee, WB 
Keywords: On-machine measurement
Shear interferometer
Surface measurement
Issue Date: 2005
Publisher: Scientific.Net
Source: Key engineering materials, 2005, v. 295-296, p. 411-416 How to cite?
Journal: Key engineering materials 
Abstract: Lateral shear interferometers have large measurement range and good anti-disturbance ability. They have similar accuracy compared with the reference based interferometers. Based on a specially designed shear generator, a new lateral shear interferometer is proposed. The new system has a complete common optical path and a simple mechanism. The optical model of the interferometer is presented and the anti-vibration characteristics are analyzed. To validate its antivibration ability for on-machine surface measurement, experimental tests have been conducted and results presented.
URI: http://hdl.handle.net/10397/15913
ISSN: 1013-9826
EISSN: 1662-9795
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