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Title: Fabrication of PZT multilayer actuator by a two-step sintering process
Authors: Zhang, Y
Tang, KW
Liu, PCK
Cheung, YM
Chan, HLW 
Choy, CL 
Keywords: Co-fire technology
Interleaving electrodes
Piezoelectric multilayer actuator
Two-step sintering
Issue Date: 2001
Publisher: Taylor & Francis Inc.
Source: Ferroelectrics, 2001, v. 263, no. 1, p. 315-320 How to cite?
Journal: Ferroelectrics 
Abstract: Lead zirconate titanate (PZT) multilayer devices have been fabricated by a two-step sintering process. The multilayer structure was first sintered at 1280°C for 5 min., then it was cooled to 1150°C and kept for 1.5 h. The sintered PZT multilayer device was studied by scanning electron microscopy and X-ray diffraction. There was little inter-diffusion between the PZT layer and the palladium-silver (Pd/Ag) electrodes and the electrodes have a high conductivity after sintering. The PZT multilayer device has good ferroelectric properties as confirmed by hysteresis loop measurements. This two-step process avoids the sintering of the PZT device at 1280°C for a prolong period of time, and thus allows the use of Pd/Ag interleaving electrodes instead of platinum (Pt) electrodes, thereby reducing the manufacturing cost.
ISSN: 0015-0193
EISSN: 1563-5112
DOI: 10.1080/00150190108225218
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