Please use this identifier to cite or link to this item: http://hdl.handle.net/10397/15616
Title: Preparation and characterization of superhard boron-suboxide films
Authors: Huang, H
Ong, CW 
Zheng, B
Kwok, RWM
Lau, WM
He, JW
Issue Date: 2003
Publisher: A V S Amer Inst Physics
Source: Journal of vacuum science and technology a : vacuum, surfaces and films, 2003, v. 21, no. 5, p. 1595-1602 How to cite?
Journal: Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films 
Abstract: The preparation and characterization of superhard boron-suboxide films were presented. The boron-suboxide films with hardness reaching 44 GPa were also synthesized. It was observed that the argon ion bombardment of the film during film growth reduced the film hardness.
URI: http://hdl.handle.net/10397/15616
ISSN: 0734-2101
DOI: 10.1116/1.1589528
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