Please use this identifier to cite or link to this item: http://hdl.handle.net/10397/15562
Title: Dielectric properties of (Ba,Ca)(Zr,Ti)O3/CaRuO3 heterostructure thin films prepared by pulsed laser deposition
Authors: Jiang, LL
Tang, XG
Li, Q
Chan, HLW 
Issue Date: 2009
Source: Vacuum, 2009, v. 83, no. 6, p. 1018-1021
Abstract: (Ba0.90Ca0.10)(Zr0.25Ti0.75)O3 (BCZT) thin films were grown on Pt/Ti/SiO2/Si substrates without and with a CaRuO3 (CRO) buffer layer using pulsed laser deposition (PLD). The structure and surface morphology of the films have been characterized by X-ray diffraction (XRD) and scanning electron microscopy (SEM). At room temperature and 1 MHz, the dependence of dielectric constant and tunability of the films with electric field were investigated; the dielectric constant and tunability are 725 and 47.0%, 877 and 50.4%, respectively, for the BCZT film on Pt/Ti/SiO2/Si substrates without and with the CRO buffer layer at 400 kV/cm. The tunability of the BCZT/CRO heterostructure thin films on Pt/Ti/SiO2/Si substrates was higher than that of the BCZT thin films on Pt/Ti/SiO2/Si substrates. The high constant likely results from the oxide electrode (CRO).
Keywords: Barium calcium zirconate titanate
Dielectric properties
Heterostructure BCZT/CRO
Pulsed laser deposition
Thin films
Tunability
Journal: Vacuum 
ISSN: 0042-207X
DOI: 10.1016/j.vacuum.2008.11.001
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