Design and analysis of a novel X-Y table

Abstract

A novel X-Y table based on linear switched reluctance principle is proposed in this paper. The proposed direct-drive actuator has the characteristics of low cost, simple mechanical structure and high reliability. Finite element analysis (FEA) proves that the phases between any of the linear motors of the X-Y table are decoupled and each phase can be controlled independently. Experimental results verify that the motion control system based on the X-Y table has good dynamic characteristics.