Please use this identifier to cite or link to this item: http://hdl.handle.net/10397/15357
Title: Nanofabrication with atomic force microscopy
Authors: Tang, Q
Shi, SQ 
Zhou, L 
Keywords: Atomic force microscopy
Dip-pen nanolithography
Force lithography
Nanofabrication
Nanografting
Nanomanipulation
Nanooxidation
Issue Date: 2004
Publisher: American Scientific Publishers
Source: Journal of nanoscience and nanotechnology, 2004, v. 4, no. 8, 16, p. 948-963 How to cite?
Journal: Journal of nanoscience and nanotechnology 
Abstract: Atomic force microscopy (AFM) was developed in 1986. It is an important and versatile surface technique, and is used in many research fields. In this review, we have summarized the methods and applications of AFM, with emphasis on nanofabrication. AFM is capable of visualizing surface properties at high spatial resolution and determining biomolecular interaction as well as fabricating nanostructures. Recently, AFM-based nanotechnologies such as nanomanipulation, force lithography, nanografting, nanooxidation and dip-pen nanolithography were developed rapidly. AFM tip (typical radius ranged from several nanometers to tens of nanometers) is used to modify the sample surface, either physically or chemically, at nanometer scale. Nanopatterns composed of semiconductors, metal, biomolecules, polymers, etc., were constructed with various AFM-based nanotechnologies, thus making AFM a promising technique for nanofabrication. AFM-based nanotechnologies have potential applications in nanoelectronics, bioanalysis, biosensors, actuators and high-density data storage devices.
URI: http://hdl.handle.net/10397/15357
ISSN: 1533-4880 (print)
DOI: 10.1166/jnn.2004.131
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