Please use this identifier to cite or link to this item: http://hdl.handle.net/10397/13979
Title: Thickness-dependent structural characteristics of sol-gel-derived epitaxial (PbZr)TiO3 films using inorganic zirconium salt
Authors: Li, AD
Mak, CL 
Wong, KH
Shao, QY
Wang, YJ
Wu, D
Ming, N
Issue Date: 2002
Source: Journal of crystal growth, 2002, v. 235, no. 1-4, p. 307-312
Abstract: Sol-gel-derived epitaxial ferroelectric Pb(Zr0.52Ti0.48)O3 (PZT) thin films with varied thicknesses of 40nm-2.4μm were successfully fabricated on LaAlO3 substrates using inorganic zirconium salt as precursor. Perovskite phase formation was achieved by rapid thermal annealing at 680°C. Thickness dependence of the structural and morphological properties of these epitaxial PZT films were investigated by means of X-ray diffractometry, scanning electron microscopy and atomic force microscopy. Thicker films showed progressively better epitaxy, improved density and smaller surface roughness. Our results suggested that this inorganic based sol-gel method is suitable for growth of epitaxial PZT thick films of up to several micrometers.
Keywords: Thickness
X-ray diffraction
Epitaxy
Sol-gel method
Perovskites
Titanium compounds
Publisher: Elsevier
Journal: Journal of crystal growth 
ISSN: 0022-0248
DOI: 10.1016/S0022-0248(01)01805-X
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