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Title: Photonic crystal cavity embedded barium strontium titanate thin-film rib waveguide prepared by focused ion beam etching
Authors: Jim, KL
Leung, CW 
Chan, HLW 
Keywords: Barium strontium titanate
Ferroelectric thin film
Photonic crystal cavity
Rib waveguide
Issue Date: 2010
Publisher: Elsevier
Source: Thin solid films, 2010, v. 518, no. 24 SUPPL., p. e101-e103 How to cite?
Journal: Thin solid films 
Abstract: A photonic crystal (PC) cavity embedded Ba0.7Sr 0.3TiO3 (barium strontium titanate, or BST) rib waveguide, which functions as an optical filter at λ = 1550 nm, is designed using finite-difference time-domain (FDTD) simulation. The PC cavity is composed of two 5-row photonic crystal mirrors, which are formed by air holes (radii 250 nm) arranged in triangular lattice (periodicity 625 nm) in the BST matrix. Calculations suggested that the required cavity length should be 800 nm for the resonant peak to be situated at 1550 nm. Based on this design, PC cavities were fabricated on BST thin-film rib waveguides by focused ion beam etching with satisfactory results. The transmission spectra of the BST thin-film rib waveguides with PC cavities have been measured. The results agreed well with the FDTD simulation.
ISSN: 0040-6090
EISSN: 1879-2731
DOI: 10.1016/j.tsf.2010.03.092
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