Please use this identifier to cite or link to this item: http://hdl.handle.net/10397/12927
Title: Sol-gel derived lead-free piezoelectric Bi1/2Na 1/2TiO3 thin film for MEMS applications
Authors: Yu, T
Kwok, KW 
Chan, H 
Keywords: Lead-free
MEMS
Piezoelectric
Sol-gel
Thin film
Issue Date: 2006
Source: IEEE International Symposium on Applications of Ferroelectrics, 2006, 4349274 How to cite?
Abstract: Bi1/2Na1/2TiO3 (abreviated as BNT) is considered as a promising lead-free piezoelectric material for sensor and actuator applications. In this study, we demonstrate an improved sol-gel process using rapid thermal annealing (RTA). Our results indicate that thermal annealing in an oxygen atmosphere after each layer of coating is effective in promoting crystallization of the BNT film at a low temperature of 650°C. The resulting film is dense and well crystallized in the perovskite phase. The piezoelectric properties of the sol-gel derived BNT films are characterized with the help of a laser interferometer. The BNT based film is expected to be a new and promising candidate for lead-free piezoelectric MEMS applications.
Description: 2006 15th IEEE International Symposium on Applications of Ferroelectrics, ISAF, Sunset Beach, NC, 30 July-3 August 2006
URI: http://hdl.handle.net/10397/12927
ISBN: 142441332X
9781424413324
DOI: 10.1109/ISAF.2006.4349274
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