Gas concentration sensor and gas concentration detection device

Abstract

The invention is suitable for the technical field of gas measurement sensing devices, and provides a gas concentration sensor and a gas concentration detection device.The gas concentration sensor comprises an incident waveguide and a reflecting element, the incident waveguide and the reflecting element are in butt joint to form an optical fiber Fabry-Perot interferometer, and the gap between the two opposite end faces of the incident waveguide and the reflecting element is not larger than 500 microns. After to-be-detected gas is filled into the optical fiber Fabry-Perot interferometer, probe light and pump light are input into the optical fiber Fabry-Perot interferometer, the wavelength of the pump light is scanned to pass through an absorption line of the to-be-detected gas, photo-thermal phase modulation is generated, and the concentration of the to-be-detected gas is obtained by demodulating phase information of the probe light. The sensor is small in size, simple in structure, good in stability, high in gas detection response speed and capable of achieving the gas concentration detection lower limit of one billion magnitude. 本发明适用于气体测量传感装置技术领域，提供了一种气体浓度传感器和气体浓度检测装置，气体浓度传感器包括入射波导和反射元件，入射波导与反射元件对接形成光纤珐珀干涉仪，入射波导和反射元件两相对端面的间隙不高于500μm。待测气体填充至光纤珐珀干涉仪后，将探测光和泵浦光输入光纤珐珀干涉仪内，扫描泵浦光的波长经过待测气体的吸收线，产生光热相位调制，通过解调探测光相位信息，获得待测气体的浓度。本申请传感器体积小，结构简单，稳定性好，气体检测响应速度快，能够实现十亿分之一量级的气体浓度检测下限。