Please use this identifier to cite or link to this item: http://hdl.handle.net/10397/11421
Title: Enhanced particle focusing in microfluidic channels with standing surface acoustic waves
Authors: Zeng, Q
Chan, HLW 
Zhao, XZ
Chen, Y
Keywords: Micro-particles
Microfluidics
Surface acoustic waves
Issue Date: 2010
Source: Microelectronic engineering, 2010, v. 87, no. 5-8, p. 1204-1206 How to cite?
Journal: Microelectronic Engineering 
Abstract: We demonstrated an enhanced particle focusing in microfluidic channels by using standing surface acoustic waves (SAWs) generated on a piezoelectric substrate. Interdigitized microelectrode arrays patterned by standard photolithography and lift-off techniques are used for both excitation and detection of SAWs. Bragg reflectors (BR) are also integrated to enhance the standing SAW formation. Furthermore, air cavities are introduced in both sides of microfluidic channels made of polydimethylsiloxane (PDMS). Whereas the system without PDMS cover layer showed a loss less than 2 db, the absorption loss after adding PDMS structures was also limited to a few db. Consequently, enhanced particle focusing could be easily observed, showing clear advantages of the use of BR and minimized PDMS wall thicknesses.
URI: http://hdl.handle.net/10397/11421
ISSN: 0167-9317
DOI: 10.1016/j.mee.2009.12.010
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