Please use this identifier to cite or link to this item: http://hdl.handle.net/10397/11355
Title: Rutherford backscattering analysis of compositionally graded Ba xSr1-xTiO3 thin films
Authors: Adikary, SU
Sundaravel, B
Chan, HLW 
Wilson, IH
Choy, CL 
Keywords: BST
compositional gradient
Rutherford backscattering
Issue Date: 2001
Publisher: Taylor & Francis Inc.
Source: Ferroelectrics, 2001, v. 262, no. 1, p. 287-292 How to cite?
Journal: Ferroelectrics 
Abstract: Rutherford backscattering spectrometry (RBS) has been successfully applied to characterize compositionally graded BaxSr1-xTiO3 thin films fabricated by the sol-gel method. BaxSr1-xTiO3 compositionally graded films from x = 0.7 to 1 (upgraded) and x = 1 to 0.7 (downgraded) were fabricated on silicon substrates as well as on Pt/Ti/SiO2/Si substrates. For both upgraded and downgraded films, the measured Ba and Sr compositional gradients along the depth are consistent with the nominal values tailored during fabrication. XRD patterns demonstrate the existence of a perovskite structure. Thicknesses determined from cross-sectional SEM micrographs are consistent with the RBS results.
URI: http://hdl.handle.net/10397/11355
ISSN: 0015-0193
EISSN: 1563-5112
DOI: 10.1080/00150190108225164
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