Standard phase detection element based on geometric phase metasurface

Abstract

The invention discloses a standard phase detection element based on geometric phase metasurface. The standard phase detection element comprises a substrate, and a phase precision detection module and a spatial resolution detection module arranged on the substrate, the phase precision detection module is composed of a plurality of first metasurfaces with different rotation angles, and the spatial resolution detection module is composed of a plurality of second metasurfaces with different sizes and different intervals. Multi-order phase distribution is generated by integrating the metasurfaces with different rotation angles, phase measurement accuracy detection of the phase measurement system is achieved, and space resolution detection of the phase measurement system is achieved by adjusting the overall size of the metasurfaces and the distance between the metasurfaces. 本发明公开了一种基于几何相位超构表面的标准相位检测元件，包括：基板和设置于所述基板上的相位精准度检测模块和空间分辨率检测模块，所述相位精准度检测模块由具有不同旋转角度的若干第一超构表面组成，所述空间分辨率检测模块由具有不同尺寸和不同间距的若干第二超构表面组成。本发明通过集成不同旋转角度的超构表面来产生多阶相位分布，实现相位测量系统的相位测量精准度检测，通过调节超构表面的整体尺寸和超构表面之间的间距，实现相位测量系统的空间解析度检测。