Please use this identifier to cite or link to this item: http://hdl.handle.net/10397/10719
Title: Effect of annealing temperature on microstructure and magnetism of FePt/TaOx bilayer
Authors: Li, G
Leung, CW 
Chen, YC
Lin, KW
Sun, AC
Hsu, JH
Pong, PWT
Keywords: Annealing temperature
Coercivity
FePt
TaOx
Issue Date: 2013
Publisher: Elsevier
Journal: Microelectronic engineering 
Abstract: The effect of annealing temperatures on the microstructures and magnetism of FePt/TaOx bilayers was systemically investigated in the range of 25-650 °C. Microstructural characterization reveals that higher annealing temperatures lead to higher ordering parameters and larger grain sizes. High order parameter up to 0.57 was acquired after the sample was annealed at 600 °C. Diffusion was observed from TaOx layer into FePt layer after annealing at temperature over 550 °C. The out-of-plane coercivity first increased and exhibited a maximum value up of 4.2 kOe after annealing at 550 °C and decreased as the annealing temperature was further increased. The coercivity increase with higher annealing temperature was attributed to the rise of magnetocrystalline anisotropy due to the formation of the ordered fct FePt structures.
URI: http://hdl.handle.net/10397/10719
ISSN: 0167-9317
EISSN: 1873-5568
DOI: 10.1016/j.mee.2013.01.028
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