Please use this identifier to cite or link to this item: http://hdl.handle.net/10397/10712
Title: Sub-micron silica diaphragm-based fiber-tip Fabry-Perot interferometer for pressure measurement
Authors: Liao, C
Liu, S
Xu, L
Wang, C
Wang, Y
Li, Z
Wang, Q
Wang, DN 
Issue Date: 2014
Publisher: Optical Society of America
Source: Optics letters, 2014, v. 39, no. 10, p. 2827-2830 How to cite?
Journal: Optics letters 
Abstract: We demonstrate a sub-micron silica diaphragm-based fiber-tip Fabry-Perot interferometer for pressure sensing applications. The thinnest silica diaphragm, with a thickness of ∼320 nm, has been achieved by use of an improved electrical arc discharge technique. Such a sub-micron silica diaphragm breaks the sensitivity limitation imposed by traditional all-silica Fabry-Perot interferometric pressure sensors and, as a result, a high pressure sensitivity of ∼1036 pm?MPa at 1550 nm and a low temperature cross-sensitivity of ∼960 Pa?°C are achieved when a silica diaphragm of ∼500 nm in thickness is used. Moreover, the all-silica spherical structure enhanced the mechanical strength of the micro-cavity sensor, making it suitable for high sensitivity pressure sensing in harsh environments.
URI: http://hdl.handle.net/10397/10712
ISSN: 0146-9592
EISSN: 1539-4794
DOI: 10.1364/OL.39.002827
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