Please use this identifier to cite or link to this item: http://hdl.handle.net/10397/10299
Title: Fabrication of fine-scale 1-3 piezoelectric arrays by aqueous gelcasting
Authors: Xie, R
Zhao, Y
Zhou, K
Zhang, D
Wang, Y 
Chan, HLW 
Issue Date: 2014
Publisher: Blackwell Publishing Inc.
Source: Journal of the American Ceramic Society, 2014, v. 97, no. 8, p. 2590-2595 How to cite?
Journal: Journal of the American Ceramic Society 
Abstract: Soft mold technique combined with a modified gelcasting process was developed to fabricate microscale piezoelectric pillar arrays. This technique involves the fabrication of high-aspect-ratio silicon master, generation of negative polydimethylsiloxane mold, and replica molding piezoelectric pillar array by gelcasting. A gelling system based on the polymerization of Hydantion epoxy resin and 3,3′-Diaminodipropylamine (DPTA) was employed. Weibull analysis revealed that 20.0 wt% Hydantion epoxy resin was the optimized concentration while the highest Weibull modulus and characteristic flexural strength of 14.8 and 90.9 MPa were obtained for lead zirconate titanate sintered bodies, respectively. Excellent piezoelectric pillar arrays with lateral dimensions around 8 μm and aspect ratio higher than five were successfully fabricated.
URI: http://hdl.handle.net/10397/10299
ISSN: 0002-7820
DOI: 10.1111/jace.13001
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