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Title: Study on barium strontium titanate thin films integrated on Si substrates by laser molecular beam epitaxy
Authors: Zhou, XY
Zhou, Y
Wang, GY
Wang, Y 
Chan, HLW 
Choy, CL 
Cao, GZ
Keywords: Barium strontium titanate
Laser mbe
Thin film
Issue Date: 2009
Publisher: Scientific.Net
Source: Advanced materials research, 2009, v. 79-82, p. 823-826 How to cite?
Journal: Advanced materials research 
Abstract: (Ba,Sr)TiO3 thin film has been deposited on Si (001) wafer with the SiO2 layer as the block layer through laser molecular-beam epitaxy using an ultra thin Sr layer as template. X-ray diffraction measurements and the cross-sectional observations under transmission electron microscope indicated that BST was well crystallized. This deposition of Sr layer is considered to remove the thin SiO2 layer to produce a layer, which is crystallized and has a lattice structure matching with that of perovskite BST. The maximum in-plane dielectric tunability is calculated to be 50% at 1 GHz under a moderate DC bias field of 13.3 V/μm. This BST/Si structure is believed to be a promising candidate in the development of ferroelectric BST-based microwave devices.
Description: 2nd International Conference on Multi-Functional Materials and Structures, MFMS-2009, Qingdao, 9-12 October 2009
ISBN: 0878493042
ISSN: 1022-6680
EISSN: 1662-8985
DOI: 10.4028/
Appears in Collections:Conference Paper

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